Hydrophobic composition film and other functional films Sputtering Deposition System
Applications:
The RTSP1213 machine is a batch model sputtering system, can deposits various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonics products, aerospace and other new energy industries.
Properties:
To improve the conductivity of surface;
High corrosion resistance;
High wear resistance;
High hardness
Hydrophobic composition film and other functional films
Available for compound coatings: metallic and non-metallic films.
Film thickness range from 100nm to 12μm, thickness tolerance ±5%
Strong adhesion.
Low tempering parts surface hardening treatment.
Type:
Vertical orientation, polyhedron structure, 2-doors (front and back )
Features:
- Environmentally friendly system, no industrial waste water, air and noise pollution;
- Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm.
- Up to 10 processing recipes login and backup; high repeatability and diversity.
- Special design of Carousel system for high uniformity of film deposition.
- High productivity and high quality
- Stable and reliable system, running 365 days * 24hrs ( maintenance and repair breaking time)
- Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known Europe brand pumps
- Compact design occupy minimum installation space.
Technical Specifications
1. Ultimate Vacuum Pressure: better than 8.0*10-5 Pa;
- Base Vacuum pressure: 3.0*10-4 Pa
3. Pumping down Time: from atm to 1.0×10-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)
4. Deposition source: balanced/unbalanced sputtering cathodes
5. Operating Model: Full Automatically /Semi-Auto/ Manually
6. Heating: from room temperature up to max. 450℃,
7. Plasma cleaning and Plasma assist deposition: Anode Linear Ion Source
8. Magnetic Closed - Loop filed. (Unbalance/balance cathodes)
9. Bias Power supply for glow discharging.
The vacuum coating machine contains key completed system listed below:
1. Vacuum Chamber
1.1 Size: Inner Diameter 1200mm
Inner Height: 1300mm
1.2 Material: Vacuum Chamber SUS304
Door and flanges SUS304
Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.
Chamber chassis SS41 mild steel with painted finishing surface treatment.
1.3 Sputtering Shield : SUS304
1.4 View Window: on chamber door - 4 sets ( 2 on each door)
1.5 Vacuum Chamber Venting Valve (including silencer)
1.6 Door: SUS304 material
2. Roughing Vacuum Pumping System:
Oil rotary vane vacuum pump +Roots pump + Holding Pump ( Leybold)
3. High Vacuum Pumping System:
Magnetic Suspension Molecular Pump ( Leybold )
4. Electrical Control and Operation System- PLC+ Touch Screen
4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type
4.2 Sputtering Power Supply + Ion source power supply + Bias Power Supply ( Advanced Energy )
4.3 Sputtering deposition control system
4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating
4.5 Measuring System
Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand
Temperature measuring device: Thermocouple
MFC: Mass Flow Controller ( 4 ways), digital display mode-- Europe brand
4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation
4.7 Power Load Indicator: Voltage indicator and load current indicator
5. Deposition System
5.1 Deposition source: Sputtering cathodes, Ion source -- Europe brand
5.2 Deposition material: Carbon target
6. Sub-System
6.1 Air Compressed Valve Control System
6.2 Cooling Water System:Water flow pipe and switch valve system
7.Working Environment
Compressed Air: 5~8kg/cm2
Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,
Power: 3 Phase 380V 50Hz(60Hz), 75kVA, average power consumption: 40KW
Installation Area: (L*W*H) 3000*4000*3200mm
Exhaust: Vent for mechanical pumps
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
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